TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder (114356)
Hiroki Kawamoto
1
,
Yasushi Kuroda
1
,
Keitaro Wtanabe
1
,
Toshie Yaguchi
1
,
Yasuhira Nagakubo
1
,
Kenji Kobayashi
1
,
Takeshi Kobayashi
1
,
Hiroaki Matsumoto
1
,
Hiromi Inada
1
- Hitachi High-Tech Corporation, Hitachinaka-shi, IBARAKI-KEN, Japan