The FIB-SEM Microscope with an Integrated fs-laser for the Atom Probe Tomography (APT) and (scanning) Transmission Electron Microscopy (TEM/STEM) Sample Preparation (114384)
Feng Lin Ng
1
,
Olena Vertsanova
2
3
,
Martina Heller
2
,
Kasem Bau
1
,
Bernd Schulz
4
- Carl Zeiss Pte. Ltd, Singapore, SINGAPORE
- Carl Zeiss Microscopy GmbH, Oberkochen
- Microelectronics Department, National Technical University of Ukraine , Kyiv
- Carl Zeiss Pty Ltd, Australia