An innovative SIMS platform with a multi-ion species FIB for high-resolution nanoanalytics, ion imaging and correlative microscopy (114137)
Torsten Richter
1
,
Peter Gnauck
1
,
Alexander Ost
1
,
Andrew Yu
2
,
Vignesh Viswanathan
2
- Raith Group, Dortmund, NRW, Germany
- Raith Asia, Hongkong