Large Wide Cross-Sections of a Crystal Oscillator Prepared with a Femtosecond Laser for SEM Imaging & EDX Analysis (114378)
Feng Lin Ng
1
,
Martina Heller
2
,
Olena Vertsanova
2
3
,
Sebastian Krauss
2
,
Kasem Bau
1
,
Bernd Schulz
4
- Carl Zeiss Pte. Ltd, Singapore, SINGAPORE
- Carl Zeiss Microscopy GmbH, Oberkochen
- Microelectronics Department, National Technical University of Ukraine , Kyiv
- Carl Zeiss Pty Ltd, Australia