Unique In-Situ Workflow for Characterization of Mechanical and Electrical Properties using AFM-in-SEM Technology (114622)
Veronika Hegrova
1
,
Radek Dao
1
,
Ondrej Novotny
1
,
Filip Ulc
1
,
Jan Neuman
1
- NenoVision s. r. o., Brno, CZECH REPUBLIC, Czech Republic